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by Takashi Yamaguchi
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Classical electrodynamics
John David Jackson
Nano- and microelectromechanical systems
Sergey Edward Lyshevski
Introduction to Microfabrication
Sami Franssila
High-speed precision motion control
Takashi Yamaguchi
Design of Electromechanical Products
Ali Jamnia
Industrial Motion Control
Hakan Gurocak
Sensors and Actuators in Mechatronics
Andrzej M. Pawlak
Electromechanical Systems and Devices
MEMS and microstructures in aerospace applications
Robert Osiander