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by Robert Osiander
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Micromechatronics
Victor Giurgiutiu
Mechatronics
Clarence W. de Silva
Numerical Simulation of Mechatronic Sensors and Actuators
Manfred Kaltenbacher
MEMS
Mohamed Gad-el-Hak
Nano- and microelectromechanical systems
Sergey Edward Lyshevski
Micro, nanosystems, and systems on chips
Alina Voda
MEMS and Microsystems
Tai-Ran Hsu
Micro-optomechatronics
Hiroshi Hosaka
Mechatronic Modeling and Simulation Using Bond Graphs
Shuvra Das
Introduction to Microfabrication
Sami Franssila
