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by Costas P. Grigoropoulos
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Vlsi Electronics
Norman G. Einspruch
Introduction to Microfabrication
Sami Franssila
Inkjet technology for digital fabrication
Ian M. Hutchings
Manufacturing Techniques for Microfabrication and Nanotechnology
Marc J. Madou
Robotic micro-assembly
Stephane Regnier
Micro and Nanomanufacturing
Mark J. Jackson
Semiconductor Micromachining 2-Volume Set
S. A. Campbell
Laser microfabrication
Daniel J. Ehrlich
Introduction to microfabrication