Manufacturing Techniques for Microfabrication and Nanotechnology

by Marc J. Madou

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TECHNOLOGY & ENGINEERING / ManufacturingTECHNOLOGY & ENGINEERING / Nanotechnology & MEMSTECHNOLOGY & ENGINEERING / Electronics / MicroelectronicsMicrofabricationNanotechnologyMicroelectronicsIntegrated circuitsElectromechanical devicesTECHNOLOGY & ENGINEERINGEngineering (General)