Roll-to-roll vacuum deposition of barrier coatings

IPAT 77

IPAT 77 (1977 Edinburgh, Scotland)

Rapid thermal annealing/chemical vapor deposition and integrated processing

Martin L. Green

Materials and processes for surface and interface engineering

Y. Pauleau

Studies on chemical vapor deposition in the gallium indium arsenide phosphide system

Chinho Park

CVD-XI

International Conference on Chemical Vapor Deposition (11th 1990 Seattle, Wash.)

Rapid thermal and related processing techniques

Monitoring and control of plasma-enhanced processing of semiconductors

James E. Griffiths

Rapid isothermal processing