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by Y. Pauleau
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IPAT 77
IPAT 77 (1977 Edinburgh, Scotland)
Rapid thermal annealing/chemical vapor deposition and integrated processing
Martin L. Green
Studies on chemical vapor deposition in the gallium indium arsenide phosphide system
Chinho Park
CVD-XI
International Conference on Chemical Vapor Deposition (11th 1990 Seattle, Wash.)
Rapid thermal and related processing techniques
Monitoring and control of plasma-enhanced processing of semiconductors
James E. Griffiths
Rapid isothermal processing
