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by Suleyman A. Gokoglu
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IPAT 77
IPAT 77 (1977 Edinburgh, Scotland)
Rapid thermal annealing/chemical vapor deposition and integrated processing
Martin L. Green
Materials and processes for surface and interface engineering
Y. Pauleau
Studies on chemical vapor deposition in the gallium indium arsenide phosphide system
Chinho Park
CVD-XI
International Conference on Chemical Vapor Deposition (11th 1990 Seattle, Wash.)
Rapid thermal and related processing techniques
Monitoring and control of plasma-enhanced processing of semiconductors
James E. Griffiths
Rapid isothermal processing
