Book dossier

Workshop on temperature measurement of semiconductor wafers using thermocouples

by Workshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples (2000 NIST)

Presentation materials from the satellite workshop held at NIST, September 19, 2000 in collaboration with the 8th International Conference on Advanced Thermal Processing of Semiconductors-- RTP'2000 outlining how to use thermocouples for measurements of temperature in semiconductor processing and how to achieve the highest accuracy.